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[1]黄　平,汪建华*,刘　繁,等.微波法制备单晶金刚石的研究进展[J].武汉工程大学学报,2016,38(4):350-356.[doi:10. 3969/j. issn. 1674?2869. 2016. 04. 009]
　HUANG Ping,WANG Jianhua*,LIU Fan,et al.Research Progress in Preparation of Mono-Crystal Diamond by Microwave Method[J].Journal of Wuhan Institute of Technology,2016,38(4):350-356.[doi:10. 3969/j. issn. 1674?2869. 2016. 04. 009]
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微波法制备单晶金刚石的研究进展(/HTML)
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《武汉工程大学学报》[ISSN:1674-2869/CN:42-1779/TQ]

卷:
38
期数:
2016年4期
页码:
350-356
栏目:
材料科学与工程
出版日期:
2016-08-28

文章信息/Info

Title:
Research Progress in Preparation of Mono-Crystal Diamond by Microwave Method
作者:
黄　平;  汪建华*; 刘　繁;  翁　俊 ; 王小安
等离子体化学与新材料湖北省重点实验室（武汉工程大学）， 湖北 武汉 430074
Author(s):
HUANG Ping;  WANG Jianhua*;  LIU Fan;  WENG Jun;  WANG Xiao’an
Hubei Key Laboratory of Plasma Chemical and Advanced Materials （Wuhan Institute of Technology）, Wuhan 430074,China
关键词:
微波等离子体; 化学气相沉积; 单晶金刚石
Keywords:
Hubei Key Laboratory of Plasma Chemical and Advanced Materials （Wuhan Institute of Technology）;  Wuhan 430074; China
分类号:
TB43
DOI:
10. 3969/j. issn. 1674?2869. 2016. 04. 009
文献标志码:
A
摘要:
人工合成金刚石的方法主要有高温高压法和化学气相沉积法两种. 高温高压法制备的金刚石尺寸小，无法避免金属杂质使得制备的金刚石应用受到限制. 在所有的化学气相沉积中，微波等离子体化学气相沉积法具有无放电污染，能量转换效率高，工艺参数易于调节等优点. 用微波等离子体化学气相沉积法制备大尺寸、高速率、高质量的单晶金刚石受到广泛重视. 介绍了微波等离子体化学气相沉积单晶金刚石的制备工艺，对提高金刚石生长速率，扩大金刚石单晶尺寸两个方面的研究进展进行了综述，并对单晶金刚石的前景进行了展望.
Abstract:
The high temperature and high pressure and the chemical vapor deposition are the main methods for preparing synthetic diamond. The diamond prepared by the high temperature and high pressure has too small sizes with metal impurities, which restricts its application. Microwave plasma chemical vapor deposition has advantages of no discharge pollution, high energy conversion efficiency, and adjustable process parameters, compared with other chemical vapor deposition, and more attention was paid on it to obtain the single diamond with large size, high speed and high quality. The technologies for preparaing single crystal diamond by microwave plasma chemical vapor deposition diamond were introduced. The research progresses in improving the diamond growth rate and scaling the size of single crystal diamond were summarized. Finally, the application of single diamond was prospected.

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更新日期/Last Update: 2016-07-29